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Microsoft-backed start-up raises $40 million for helium atom beam lithography that could print chips at atomic resolution — 0.1nm beam is 135 times narrower than ASML's EUV light (tomshardware.com)
2026-03-24 | by Luke James | get NanoAtomic Beam Lithography Kit → | tags: lace lithography, helium atom beam, asml
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