TL;DR: ASML's most advanced chipmaking tools have become the focus of a renewed dispute in Washington over how far the US should go to keep cutting-edge semiconductor technology out of China. In recent months, the Trump administration has pressed ASML over whether one of its extreme ultraviolet (EUV) lithography machines may have slipped past export controls and ended up in China. According to people familiar with the talks, Commerce Secretary Howard Lutnick raised the issue directly with ASML's senior leadership, asking whether a machine that has never been approved for export to China could have nonetheless reached the country.
EUV is the technology that underpins today's most advanced processors. The machines are used by companies such as TSMC to manufacture high-performance chips for Nvidia and Apple. They are roughly the size of a school bus, are produced in limited quantities, and require constant maintenance from ASML engineers.
US export rules have long barred ASML from selling EUV tools to China, and the company says it complies with those restrictions. In its discussions with Lutnick, ASML pushed back on the suggestion that an EUV system could be operating in China, according to people familiar with the talks.
A company spokesperson, responding to questions about those meetings, said ASML has never shipped an EUV machine to China and stressed that it regularly engages with governments worldwide while adhering to export regulations.
The conversation has taken on a sharper edge in Washington. Multiple senior Trump administration officials, speaking on condition of anonymity, said they believe ASML is not acting in good faith, citing exports to China of equipment they say is specifically related to EUV tools.
They declined to provide documentation, citing the sensitivity of the information, and did not say they had proof of an actual EUV machine operating in China. ASML, for its part, denied to Bloomberg that it has shipped any EUV-specific equipment to China.
Behind the scenes, the pressure has triggered an internal scramble at ASML. After Lutnick's April meeting, the company prepared a document titled "No Indication of Any ASML EUV System in China" and circulated it among officials in Washington, according to people familiar with the situation.
The document, reviewed by Bloomberg, says there are 314 EUV machines in use worldwide and 26 that have been decommissioned, with none located in China. It also states that ASML can automatically detect "any interruption, abnormal behavior, or loss of connectivity" across its EUV fleet, and that customers "cannot remove, transport, or relocate EUV systems without ASML involvement due to specialized handling procedures."
Those technical constraints are central to ASML's argument. EUV tools are so complex that they effectively remain under the company's oversight throughout their operational life. ASML says customers cannot remove, transport, or relocate EUV systems without its involvement because of specialized handling requirements.
Yet skepticism within the Trump administration persists. Senior officials say they have evidence that ASML shipped specialized transport equipment and other components for use with EUV systems to Chinese customers, though they have declined to provide supporting records.
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