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Heterogeneous photonic integration of single-crystalline nanomembranes

2026-09-16 | original
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Why This Matters

This reference list points to a growing body of research on integrating single-crystalline nanomembranes and complex-oxide materials onto photonic and electronic chips using techniques like remote epitaxy and 2D-material-based layer transfer. This heterogeneous integration approach could unlock next-generation photonic devices—combining performance materials beyond silicon—for applications in telecommunications, sensing, and computing. It matters because it addresses a key bottleneck in scaling photonic integrated circuits with diverse functional materials.

Key Takeaways

Riemensberger, J. et al. A photonic integrated continuous-travelling-wave parametric amplifier. Nature 612, 56–61 (2022).

Tran, M. et al. Extending the spectrum of fully integrated photonics. Nature 610, 54–60 (2022).

Kaur, P. et al. Hybrid and heterogeneous photonic integration. APL Photonics 6, 061102 (2021).

Shekhar, S. et al. Roadmapping the next generation of silicon photonics. Nat. Commun. 15, 751 (2024).

Liu, Y., Huang, Y. & Duan, X. Van der Waals integration before and beyond two-dimensional materials. Nature 567, 323–333 (2019).

Kum, H. S. et al. Heterogeneous integration of single-crystalline complex-oxide membranes. Nature 578, 75–81 (2020).

Rogers, J. A., Lagally, M. G. & Nuzzo, R. G. Synthesis, assembly and applications of semiconductor nanomembranes. Nature 477, 45–53 (2011).

Zhang, X. et al. Atomic lift-off of epitaxial membranes for cooling-free infrared detection. Nature 641, 98–105 (2025).

Choi, C. et al. Reconfigurable heterogeneous integration using stackable chips with embedded artificial intelligence. Nat. Electron. 5, 386–393 (2022).

Meng, Y. et al. Photonic van der Waals integration from 2D materials to 3D nanomembranes. Nat. Rev. Mater. 8, 498–517 (2023).

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Explore topics: photonic integration nanomembranes silicon photonics van der waals integration remote epitaxy
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