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1.
Chinese chipmaking tool roadmaps examined — Beijing's nascent lithography tools target DUV production at five machines a year, and an EUV prototype with no chips (tomshardware.com)
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China Begins Mass Production of Homegrown DUV Chip Tools (slashdot.org)
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China begins mass production of homegrown immersion chipmaking machines in major breakthrough, report claims — first DUV lithography units will be delivered this year to SMIC, Hua Hong, and CXMT (tomshardware.com)
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