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ASML's planned Low-NA EUV machine price hikes reportedly frustrate TSMC — lithography machine maker comes knocking to make bank on TSMC's profitable fabs, potentially costing the Taiwanese chipmaker billions

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Why This Matters

ASML's potential price hikes for Low-NA EUV lithography tools could significantly impact the semiconductor industry, especially major clients like TSMC. While these increases aim to reflect the tools' growing productivity and value, they may lead to higher costs for chipmakers and influence global supply chains. The move underscores ASML's strategic focus on value-based pricing amid record financial performance.

Key Takeaways

ASML is reportedly considering increasing prices of its existing Low-NA EUV lithography tools. The potential price hikes have already upset TSMC, ASML's largest client, reports The Information. But can ASML rapidly raise the prices of the tools it sells to chipmakers? Price adjustments are not going to happen overnight, said Roger Dassen, CFO of ASML, said during the company's quarterly earnings call. But there is one thing to remember about ASML's price hikes: They are going to affect the entire semiconductor industry.

"When it comes to Low-NA [EUV tools] pricing, of course, you know that we keep on increasing the productivity of the Low-NA tool, [which] gives us a pretty strong runway for potential price improvements going forward," said Roger Dassen, chief financial officer of ASML, during the company's quarterly earnings call. […] Given the long order lead times that we have, that does not translate into pricing effects tomorrow."

ASML just reported record results for its second quarter of 2026, with total net sales of €9.326 billion ($10.67 billion) and net income of €2.918 billion ($3.338 billion). The company now expects net sales between €43 billion ($49.2 billion) and €45 billion ($51.5 billion) in 2026, a range that comfortably exceeds its own guidance and the expectations of industry analysts.

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More complex, more expensive

ASML has generally increased the average selling price of EUV scanners over successive generations as they increase in complexity and productivity, so the idea of higher pricing of EUV tools is not particularly new. The company calls the concept of 'value-based pricing' and gradually increases its average selling price (ASP) based on the value that its tools provide to its operators.

(Image credit: ASML)

Early ASML Twinscan NXE systems were commonly discussed in the roughly €100 million–€120 million ($115 million-$137 million) range, while later production models such as the NXE:3400C and NXE:3600D moved toward roughly €140 million–€170 million ($160 million-$195 million). The latest NXE:3800E is climbing even further. High-NA EXE systems represent another major step up, at more than €350 million ($400 million) per machine according to industry reports.

Meanwhile, both productivity and performance of ASML's Twinscan NXE systems have been steadily increasing: While the NXE:3400C and NXE:3600D can process 160 – 170 wafers per hour (WPH) and feature a matched machine overlay (MMO) of ≤ 1.1nm, the NXE:3800E and NXE:3800F increase productivity to 220 WPH and 260 WPH, respectively, while increasing MMO to 0.9nm. With the NXE:4200G and NXE:4200H (which will likely feature an all-new light source), we are looking at productivity beyond 300 WPH and MMO of ≤0.8nm - ≤0.7nm.

ASML makes no secret that more advanced EUV lithography tools carry a higher average selling price than their predecessors.

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