GoKawiilReport: China has amassed 343 ASML immersion DUV lithography tools since 2012
The Centre for Technology & Statecraft estimates Chinese chipmakers imported 343 immersion DUV lithography scanners from ASML between 2012 and early 2026, not counting equipment sent to multinational fabs operating in China. CTS says about 270 of these are Twinscan NXT:1980i machines, which offer resolution and overlay precision that could support 7nm-class chip production through multipatterning techniques.