GoKawiilZNTC completes prototype 130nm lithography tool for Russian chipmaking
Zelenograd Nanotechnology Center has finished the third R&D phase of a lithography tool capable of processing 200mm wafers at a 130nm process node, according to CNews. The prototype is still undergoing internal testing and remains years from deployment in a production fab, with development work shared across ZNTC, Belarus-based Planar, and laser maker Lassard, under a roughly $70 million program funded by Russia's Ministry of Industry and Trade.