Chinese startup Langdao Silex unveils prototype EUV light source
Langdao Silex, founded in 2024 by alumni of Tsinghua University's Gas Discharge Plasma Laboratory, showed off a prototype laser-produced plasma EUV light source called FlintNano LPP-OXXO at a Shanghai trade fair. The unit reportedly outputs over 15W with 90% domestically sourced components and can run continuously for more than 100 hours, but TrendForce reports commercialization is still three to five years away.