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Wafer Bonding

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Micron outlines wafer bonding, High-NA EUV roadmap for future DRAM nodes

Micron has dropped 4F2 memory cells from its roadmap and instead plans to introduce wafer bonding starting with its 1ε DRAM process, following the 1δ node due for volume production in late 2027. For later nodes, codenamed zeta angstrom and eta angstrom, Micron says it will adopt High-NA EUV lithography and new materials to keep shrinking DRAM cells. CTO Scott DeBoer said the company is also developing 3D DRAM alongside new memory types like vertical HBM and vertical edge inference memory for direct integration atop processors.

Micron's G11 3D NAND to use wafer bonding, ship in late 2027

Micron announced its next-generation G11 3D NAND will enter mass production in the second half of 2027, roughly doubling bit density versus its current G9 generation while boosting I/O speeds by up to 50% and cutting per-bit data transfer energy by more than 25%. CTO Scott DeBoer said G11 will adopt wafer-on-wafer bonding technology, a manufacturing approach previously used by YMTC, exceeding 400 layers.